@Article{UedaTanDallRoss:2007:SeElSu,
               author = "Ueda, M{\'a}rio and Tan, Ing Hwie and Dallaqua, Renato 
                         S{\'e}rgio and Rossi, Jos{\'e} Oswaldo",
          affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto 
                         Nacional de Pesquisas Espaciais (INPE)} and {Instituto Nacional de 
                         Pesquisas Espaciais (INPE)} and {Instituto Nacional de Pesquisas 
                         Espaciais (INPE)}",
                title = "Secondary electron suppression in nitrogen plasma ion implantation 
                         using a low DC magnetic field",
              journal = "Surface and Coatings Technology",
                 year = "2007",
               volume = "201",
               number = "15",
                pages = "6597--6600",
                month = "Apr",
             keywords = "Plasma immersion ion implantation, Secondary electrons, Magnetic 
                         suppression.",
             abstract = "Experiments aiming at the reduction or even total suppression of 
                         secondary electrons during the plasma immersion ion implantation 
                         were carried out using a plasma device with low DC magnetic field. 
                         Comparison of ion implantations in B = 0 and another case with B = 
                         43 G, indicated that the magnetic field was effective to suppress 
                         SE flow in the direction transversal to B but only partial 
                         suppression was attained in the longitudinal direction. However, 
                         these results are already significant since the efficiency of 
                         implantation was increased and the flow of SE to the walls became 
                         localized to the regions with B crossing the walls.",
           copyholder = "SID/SCD",
                 issn = "0257-8972",
             language = "en",
           targetfile = "secondary electron.pdf",
        urlaccessdate = "18 maio 2024"
}